Parylene Coating Machine coats an ultra-thin transparent film on the coating substrates that are placed in a vacuum chamber. The deposition process is carried out under vacuum conditions and at room temperature.
Power Supply: 208 /220/ 380 V , 3 phase
Ambient Temperature for Operating:15 – 40℃
Ambient Humidity for Operating: ≤80%RH
Exhaust: external exhaust for vacuum pump
Parylene Coating Machine
Picture shown for reference only, actual configuration / layout may differ from the above picture.
PLC / PC Control , programmable recipes for different batch sizes, dimer type, and thickness requirement
2300 mm x1200mm x1500mm (excluding chiller)
Vaporization Temperature: Highest 180℃
Temperature Uniformity: ≤ ±2%
Constant temperature stability: ≤ ±1%
Pyrolysis temperature： 650-750℃
Constant temperature stability ≤ ±1%
SUS 304 Deposition Chamber： 500mm x 750mm (ht)
Rotating Deposition Fixture 1 unit
Deposition chamber vacuum: ≤4.0*10² Torr Vacuum Time: ≤30min
Deposition rate (maximum value, in the normal vacuum state): Parylene C ≥5μm/h; Parylene N ≥0.8μm/h [Actual deposition conditions are determined by user and varies according to part loading in chamber]
Ambient Temperature for Deposition Chamber: 20±5℃
Chiller Unit: < -85 ℃ Ultra-low temperature mechanical chiller
Performance Pumping Speed: >18L/S
Performance Rotation Speed: 0- 5 r/min
Vaporization Chamber, Pyrolysis Chamber, Deposit Chamber, High Temperature Quartz Tube, SUS and etc.